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Department of Industrial Engineering - DIN

Scientific publications

1991 Delete filter
Contribution to conference proceedings Delete filter

1 publications

  • Kawai, K.; Panarella, Emilio; Mostacci, D., Spherical pinch x-ray generator prototype for microlithography, in: Proc. SPIE 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing, Bellingham, Publ by Int Soc for Optical Engineering, «PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING», 1991, 1465, pp. 308 - 314 (atti di: Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing, San Jose, CA, USA,, 01/08/1991) [Contribution to conference proceedings]